发光学报2001，Vol.22Issue(z1)：103-106,4.
用于Ⅲ族氮化物生长的紧配合喷淋头反应器
Close Coupled Showerhead Reactors for the Growth of Group Ⅲ Nitrides
Thrush 1E 1J 1Considine 1L 1Mullins 2T 2Saywell 3V 3Bentham 3F 3C 3Sharma 3N 3Humphreys 3Kappers 3M3
作者信息
- 1. Thomas Swan Scientific Equipnent Limited, Buckingway Business Park,
- 2. Department of Materials Science and Metallurgy, University of Combridge,
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摘要
关键词
MOCVD/密配合喷淋头反应器/Ⅲ族氮化物生长分类
信息技术与安全科学引用本文复制引用
Thrush,E,J,Considine,L,Mullins,T,Saywell,V,Bentham,F,C,Sharma,N,Humphreys,Kappers,M..用于Ⅲ族氮化物生长的紧配合喷淋头反应器[J].发光学报,2001,22(z1):103-106,4.
