物理学报2001，Vol.50Issue(6)：1046-1051,6.
提高光栅衍射计算收敛性的途径
APPROACHES TO IMPROVE THE CALCULATING CONVERGENCE OF GRATING DIFFRACTION
摘要
Abstract
From three respects such as mathematical principle,geometric stratification and numerical calculation,we have studied the convergence of rigorous coupled-wave approach (RCWA) in solving the grating diffraction problems.The approaches which can be applied to improve the convergence of RCWA are proposed.It is found that,for different cases of grating,the major factors affecting the convergence of RCWA are different.Therefore,the improving methods should be practically chosen for concrete case of grating.关键词
耦合波法/校正傅里叶展开/多层近似/收敛分类
数理科学引用本文复制引用
周传宏,王磊,王植恒..提高光栅衍射计算收敛性的途径[J].物理学报,2001,50(6):1046-1051,6.基金项目
国家自然科学基金(批准号：69888002)及中国科学院光电技术研究所微细加工光学技术国家重点实验室资助的课题. （批准号：69888002）
