无机材料学报2000，Vol.15Issue(6)：1067-1072,6.
二氧化锡薄膜的电阻气敏和光透射率气敏性能
Resistance Gas Sensitivity and Transmittance Gas Sensitivity of SnO2 Thin Film by a Novel Sol-Gel Method
林殷茵 1汤庭鳌 1黄维宁 1姜国宝 1姚熹2
作者信息
- 1. 上海复旦大学电子工程系微电子所，上海200433
- 2. 西安交通大学电子材料研究所，西安710049
- 折叠
摘要
Abstract
SnO2 thin film with good resistance-gas sensitivity was prepared by a novel sol-gel method using inorganic salts as starting materials. The sensitivity of the thin film to 600ppm CO was up to 500 at the optimal working temperature of 200℃, white the respondence time and recovery time were 13s and 20s respectively. The transmittance gas sensitivity was investigated and it was found that the transmittance of the thin film decreased in CO atmosphere. The best working temperature of the transmittance gas sensitivity is the same as that of the resistance gas sensitivity. Both resistance gas sensitivity and transimittance gas sensitivity decrease when the annealing temperature of the thin film increases. The reason of abouve phenomenon was discussed.关键词
薄膜/二氧化锡/气敏/透射率/溶胶-凝胶Key words
thin film/SnO2/gas sensitive/transmittance/sol-gel method分类
数理科学引用本文复制引用
林殷茵,汤庭鳌,黄维宁,姜国宝,姚熹..二氧化锡薄膜的电阻气敏和光透射率气敏性能[J].无机材料学报,2000,15(6):1067-1072,6.
