半导体学报2008，Vol.29Issue(6)：1081-1087,7.
喷雾清洗中微颗粒受到流体作用力的研究
Numerical Study on Hydrodynamic Forces for Micro Particle Detachment by Droplet Impact
摘要
Abstract
This paper presents the results of a numerical investigation of micro-sized particle removal by droplet impact.Computational fluid dynamics simulation is used to calculate the flow distribution of droplet impact on a flat surface. The hydrodynamic forces exerted on the particle are then computed. Key factors controlling particle removal are discussed.Both hydrophilic and hydrophobic surfaces are considered. The flow distributions, especially the front edge expanding upon impact at microscale,strongly depend on surface wettability. The associated hydrodynamic forces on the particles vary ac-cordingly. In addition, the impact on a dry surface can produce higher removal efficiency than that on a wet surface. Under the same impact conditions, the drag force exerted on a particle residing on a dry surface can be three orders of magnitudes larger than on a wet surface. Improving droplet impact velocity is more effective than improving droplet size.关键词
液滴撞击/颗粒去除/拽力/升力/可湿性Key words
droplet impact/ particle removal/ drag force/ lift force/ wettability分类
电子信息工程引用本文复制引用
孙震海,韩瑞津..喷雾清洗中微颗粒受到流体作用力的研究[J].半导体学报,2008,29(6):1081-1087,7.基金项目
上海宏力半导体制造有限公司资助项目 Project supported by the Grace Semiconductor Manufacturing Corporation （）
