人工晶体学报2007，Vol.36Issue(5)：1085-1090,6.
热丝化学气相法生长单晶金刚石颗粒的衬底温度场仿真及实验研究
Simulation of Temperature Field in the Growth of Diamond Crystals by Hot Filament CVD and Experimental Study
摘要
Abstract
Single crystal diamonds were grown on small diamond abrasive particles which were employed as seed crystals using HFCVD method. The influence of many factors, such as the size and arrangement of hot filaments, the temperature field of substrate and the distribution of small diamond abrasive particles on the growth rate and quality of homoepitaxial single crystal diamonds were analyzed. Three-dimensional finite element models were developed to investigate the temperature field in the CVD reactor which made significant contributions to the growth of single crystal diamonds. Based on the temperature distribution measured by thermocouple fixed in CAD reactor, the simulation was validated and the optimum arrangement of seed crystals was established from the simulation results. Furthermore, the simulation model was altered to optimize the process parameters of HFCVD deposition, and an improved process of depositing single crystal diamonds with high efficiency and great crystal shape was obtained, which laid the foundation of developing a new process of depositing large single crystal diamonds. As while, the CVD homoepitaxial coating recovery suggested a new method to improve the grade of crystal shape by HPHT process.关键词
热丝化学气相沉积/温度场/仿真/单晶金刚石颗粒/同质外延生长Key words
hot filament chemical vapor deposition (HFCVD)/ temperature field/ simulation/ single crystal diamond/ homoepitaxial growth分类
数理科学引用本文复制引用
左伟,沈彬,孙方宏,陈明..热丝化学气相法生长单晶金刚石颗粒的衬底温度场仿真及实验研究[J].人工晶体学报,2007,36(5):1085-1090,6.基金项目
This work supported by the National Natural Science Foundation of China (No. 50575135) （No. 50575135）
