半导体学报2005，Vol.26Issue(6)：1087-1093,7.
单悬臂梁结构的GaAs基MOEMS可调谐RCE光探测器
A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam
摘要
Abstract
A GaAs-based micro-opto-electro-mech anical-systems(MOEMS) tunable resonant cavity enhanced(RCE)photodetector with a continuous tuning range of 31nm under a 6V tuning voltage is demonstrated. The single cantilever beam structure is adopted for this MOEMS tunable RCE photodetector. The maximum and minimum peak quantum efficiency during the tuning are 36.9 % and 30. 8 %, respectively. The maximum and minimum full-width-at-halfmaximum (FWHM) are 20nm and 14nm,respectively. The dark current density is 7.46A/m2 without bias.关键词
GaAs/MOEMS/RCE/光探测器/调谐/单悬臂梁Key words
GaAs/MOEMS/RCE/photodetector/tuning/single cantilever beam分类
信息技术与安全科学引用本文复制引用
周震,韩勤,杜云,杨晓红,吴荣汉,黄永清,任晓敏..单悬臂梁结构的GaAs基MOEMS可调谐RCE光探测器[J].半导体学报,2005,26(6):1087-1093,7.基金项目
国家重点基础研究发展计划资助项目(批准号:2003CB314900) （批准号:2003CB314900）
