光学精密工程2001，Vol.9Issue(2)：109-114,6.
高效平面全息衍射光栅的获取方法
Manufacturing of high efficient holographic diffraction gratings
赵博 1齐向东2
作者信息
- 1. 北京大学遥感与地理信息系统研究所,
- 2. 中国科学院长春光学精密机械与物理研究所,
- 折叠
摘要
Abstract
In light of the manufacturing principles of holographic diffraction gratings, the paper presents a main method of manufacturing the holographic gratings. In comparison with ruling gratings, the holographic diffraction gratings have many advantages. Using the coupling wave theory and ion etching, the design and efficiency of the gratings have been optimized and improved, respectively. The paper also gives various key technologies in manufacturing high efficient holographic diffraction gratings in detail.关键词
全息光栅/离子刻蚀/衍射效率分类
数理科学引用本文复制引用
赵博,齐向东..高效平面全息衍射光栅的获取方法[J].光学精密工程,2001,9(2):109-114,6.
