测控技术2009，Vol.28Issue(7)：11-13,17,4.
MEMS加速度计的六位置测试法
Six-Position Testing of MEMS Accelerometer
宋丽君 1秦永元1
作者信息
- 1. 西北工业大学,自动化学院,陕西,西安,710072
- 折叠
摘要
Abstract
A six-position testing method of MEMS accelerometer is introduced mainly. According to the error model of MEMS accelerometer the scale factor of MEMS accelerometer, bias of MEMS accelerometer and error on installation of MEMS accelerometer are derived. When the user gets these parameters, the user should pack the function of the concrete mathematics model in C code. By analyzing the results of examination, the six-posi-tion testing method of MEMS accelerometer is simple on principle, easy to realize and high in precision as long as the user gets the error model of MEMS accelerometer. And the scale factor nonlinearity is improved by the error model of MEMS accelerometer.关键词
MEMS加速度计/六位置测试法/刻度因数/安装误差/线性度Key words
MEMS accelerometer/six-position testing/scale factors/error of installation/nonlinearity分类
航空航天引用本文复制引用
宋丽君,秦永元..MEMS加速度计的六位置测试法[J].测控技术,2009,28(7):11-13,17,4.
