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Study of filament performance in heat transfer and hydrogen dissociation in diamond chemical vapor deposition

金刚石与磨料磨具工程Issue(1)：11-17,7.

Study of filament performance in heat transfer and hydrogen dissociation in diamond chemical vapor deposition

作者信息

1. School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai 200237, China;School of Engineering Science, University of Science and Technology of China, Hefei 230027, China;School of Engineering Science, University of Science and Technology of China, Hefei 230027, China;School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai 200237, China
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摘要

Abstract

Hot-filament chemical vapor deposition (HFCVD) is a promising method for commercial production of diamond films.Filament performance in heat transfer and hydrogen decomposition in reactive environment was investigated. Power consumption by the filament in vacuum, helium and 2% CH4/H2 was experimentally determined in temperature range 1300℃-2200℃. Filament heat transfer mechanism in C-H reactive environment was calculated and analyzed. The result shows that due to surface carburization and slight carbon deposition, radiation in stead of hydrogen dissociation, becomes the largest contributor to power consumption. Filament-surface dissociation of H2 was observed at temperatures below 1873K, demonstrating the feasibility of diamond growth at low filament temperatures. The effective activation energies of hydrogen dissociation on several clean refractory filaments were derived from power consumption data in literatures. They are all lower than that of thermal dissociation of hydrogen, revealing the nature of catalytic dissociation of hydrogen on filament surface. Observation of substrate temperature suggested a weakerrole of atomic hydrogen recombination in heating substrates in C-H environment than in pure hydrogen.

关键词

Hot-filament/Chemical vapor deposition (CVD)/Diamond film/Heat transfer/Hydrogen dissociation

Key words

Hot-filament/Chemical vapor deposition (CVD)/Diamond film/Heat transfer/Hydrogen dissociation

分类

化学化工

引用本文复制引用

..Study of filament performance in heat transfer and hydrogen dissociation in diamond chemical vapor deposition[J].金刚石与磨料磨具工程,2006,(1):11-17,7.

基金项目

Supported by the National Natural Science Foundation of China under contract No. 59976038. （）

金刚石与磨料磨具工程

OA北大核心CSTPCD

ISSN：1006-852X

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