半导体学报2002，Vol.23Issue(11)：1135-1139,5.
980nm垂直腔型面发射和接收器件及列阵的研制
Array for 980nm Vertical Cavity Surface Emitting Diodes and Detectors
摘要
Abstract
Both the vertical cavity surface emitting diodes and detectors are fabricated by using the epitaxial wafer with resonant cavity structure.Their characteristics are analyzed.The light emitters have high spectral purity of 4.8nm and high electroluminescence intensity of 0.7mW while injection current is 50mA.A 1×16 array of surface emitting light device is tested on line by probes and then used for module.The light detectors have wavelength selectivity and space selectivity.The required difference in input mirror reflectivity between emitters and detectors can easily be achieved though varying the numbers of top DBR period by etching.关键词
光互连/谐振腔增强型光子器件/单片集成Key words
optical interconnects/resonant cavity enhanced phtotonic devices/monolithic integration分类
信息技术与安全科学引用本文复制引用
梁琨,陈弘达,杜云,唐君,杨晓红,吴荣汉..980nm垂直腔型面发射和接收器件及列阵的研制[J].半导体学报,2002,23(11):1135-1139,5.基金项目
国家自然科学基金(批准号:60137020,69896260,69776036)和国家863计划(Nos.2001AA122032,2001AA312080)资助项目 （批准号:60137020,69896260,69776036）
