半导体学报2003，Vol.24Issue(11)：1145-1148,4.
窗口型极小孔激光器的研制
Fabrication of Windowed Very-Small-Aperture Laser Diodes
摘要
Abstract
A windowed very-small-aperture laser (VSAL) source for use in high-resolution near field optical data storage is fabricated.The windowed regions are introduced to avoid shorting the pn junction with metal coating and suppress the COD effect.It facilitates producing VSAL by simplified technology and improves the laser performance.A VSAL with 400nm small aperture is demonstrated by focused ion beam (FIB) and the output power is 0.3mW at 31mA.关键词
极小孔激光器/近场光学/脊形波导/聚焦离子束Key words
very-small-aperture laser/optical near field/ridge waveguide/focused ion beam分类
信息技术与安全科学引用本文复制引用
康香宁,徐云,宋国峰,叶晓军,陈良惠..窗口型极小孔激光器的研制[J].半导体学报,2003,24(11):1145-1148,4.基金项目
国家高技术研究发展计划资助项目(No.2002AA313060) （No.2002AA313060）
