人工晶体学报2007，Vol.36Issue(5)：1148-1154,7.
脉冲重复频率对脉冲激光沉积薄膜的生长过程的影响
Effect of Pulse Repetition Rate on Film Growth in Pulsed Laser Deposition
摘要
Abstract
Pulse repetition rate plays an important role in pulsed laser deposition (PLD) technique,which has been shown to have an influence on final material properties. Using kinetic Monte Carlo method, we simulated the early stage of film growth with varying pulse repetition rate in pulsed laser deposition process. The simulation results display that at a low pulse repetition rate increase, there is such a longer pulse interval that islands are given more time to ripen. As a result, the total of island density reduces and film aggregation tends to compact shape. Island density will increase with pulse repetition rate increase, and islands may be in dispersed or dendritic mode. Duty cycle, that is,deposition time also can effect on islands aggregation to a certain extent. The obtained results have been compared with some experimental data.关键词
脉冲激光沉积/动力学蒙特卡罗方法/薄膜生长Key words
pulsed laser deposition/ kinetic Monte carlo methods/ film growth分类
数理科学引用本文复制引用
关丽,李旭,张端明,张玮..脉冲重复频率对脉冲激光沉积薄膜的生长过程的影响[J].人工晶体学报,2007,36(5):1148-1154,7.基金项目
Project supported by the National Scienctist Fund f~ Youth Science of China (No. 10604017) （No. 10604017）
