光学精密工程2009，Vol.17Issue(6)：1223-1227,5.
引信MEMS静电探测器阵列设计
Design of fuze MEMS electrostatic detection array
摘要
Abstract
The motion of a target in air will produce electrostatic fields which can be detected by a fuze to provide some useful information of the target. Moreover, MEMS devices have shown their characteristics of small sizes, low power consumption and high integration to be suitable for design of MEMS electrostatic detection arrays.When a MEMS electrostatic detection arrayis placed in the limited space of a fuze,the array can acquire the information of position and velocity of the target by detecting electric field around it. A MEMS electrostatic field detection array with a vibrating filmis designed using surface machining processes in this paper. The princile and fabrication of the electric field detection array are systematically presented and the processing techniques of a electrostatic field sensor are explained particularly. The principle and formula of target locating are also studied .The results show that the electrostatic field of the target can be detected by using three MEMS electrostatic detectors,and the positions of the point target along the axis of the projectile and vertical to the axis of the projectile can be obtained. It is concluded that the MEMS electrostatic detection array can locate exactly the target.关键词
微机电系统/静电探测阵列/引信/电场传感器/有限元法Key words
MEMS/electrostatic detection array/fuze/electrostatic field sensor/finite element method分类
信息技术与安全科学引用本文复制引用
郝晓辉,徐立新,崔占忠,陈曦..引信MEMS静电探测器阵列设计[J].光学精密工程,2009,17(6):1223-1227,5.基金项目
Supported by the Beforehand Research Foundation of National Defence （）
