光学精密工程2009，Vol.17Issue(6)：1257-1261,5.
基于阿基米德螺旋线的低g值微惯性开关
Low-g micro inertial switch based on Archimedes' spiral
摘要
Abstract
The low-g inertial switch is a kind of inertial device sensitive to the linear acceleration and achieves the switch closure when subjects to the applied acceleration.Due to its micro size,the switch is designed as a structure with the micro mass and low stiffness. To achieve a low stiffness beam in a micro plane, the planar spiral beam based on Archimedes' spiral is designed. The inertial switch is composed of a substrate,a frame structure,a cover plate and an inertial sensing element containing a sensor mass and a spiral beam.After analysing the inertial sensing element with an ANSYS and fabricating with an UV-LIGA, the laboratory centrifuge tests are performed on the low-g inertial switch to measurethe on-state threshold. The result of the test is 21.27g,which is the average of 21.22, 21.39, and 21.20g. It is shown that the low-g mechanical inertial switch has a closed precision of 0.5g and good repeatability in multiple tests.关键词
惯性开关/低g值开关/阿基米德螺旋线/微机电系统Key words
inertial switch/low-g switch/Archimedes' spiral/MEMS分类
信息技术与安全科学引用本文复制引用
陈光焱,吴嘉丽,赵龙,王超..基于阿基米德螺旋线的低g值微惯性开关[J].光学精密工程,2009,17(6):1257-1261,5.基金项目
Supported by the Foundation of NASF (GrantNo. 10476019) （GrantNo. 10476019）
