半导体学报2002，Vol.23Issue(12)：1298-1302,5.
微型电磁继电器的制作和仿真分析
Fabrication and Simulation of an Electromagnetic Microrelay
摘要
Abstract
The fabrication and simulation of an electromagnetic microrelay are presented based on micro electromechanical systems (MEMS) technique.The microrelay dimensions of about 4mm×4mm×0.5mm are fabricated with the common technique of micromachining.Compared with the traditional relays,a planar coil is substituted for a solenoid coil to favor the MEMS fabrication.Moreover,a bi-supporter cantilever beam with high sensitivity is fabricated to act as the movable electrode of the microrelay.Theoretical calculations and simulations are also carried out with respect to the electromagnetic force yielded by the exciting electromagnetic coil.The structure and parameters concerning the electromagnetic microrelay can be optimized using the results.关键词
微型电磁继电器/MEMS/微加工技术/平面线圈/双支撑悬臂梁Key words
electromagnetic microrelay/MEMS/micromachining/planar coil/cantilever beam分类
信息技术与安全科学引用本文复制引用
张宇峰,李德胜..微型电磁继电器的制作和仿真分析[J].半导体学报,2002,23(12):1298-1302,5.基金项目
国家自然科学基金资助项目(批准号:69976011) （批准号:69976011）
