硅酸盐学报2008，Vol.36Issue(9)：1315-1318,4.
等离子体增强化学气相沉积技术制备锗反蛋白石三维光子晶体
FABRICATION OF GERMANIUM INVERSE OPAL THREE DIMENSIONAL PHOTON CRYSTAL BY THE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION TECHNIQUES
摘要
Abstract
Monodisperse silica microspheres were assembled into a three-dimensional colloidal crystal template with long-range order by the solvent vaporization convection self-assembly method. Using GeH4 as the precursor gas, the plasma enhanced chemical vapor deposition method was then used to fill the voids of the silica colloidal crystal template with high refractive index germanium, and germanium inverse opal photonic crystal was obtained. The modality, components and structure of the resulting samples were charac-terized by scanning electron microscope and X-ray diffraction. The results show that germanium is homogeneously distributed inside the voids of the silica template. Its crystalline state is polycrystalline. Germanium inverse opal exhibits a three-dimensional ordered porous structure. The potential advantage of plasma enhanced chemical vapor deposition is that it can fill materials at lower tempera-ture, so by this method, macromolecule materials can be used as templates, and thus, the three-dimensional photonic crystal with more kinds of structures can be obtained.关键词
光子晶体/锗反蛋白石/等离子增强化学气相沉积/溶剂蒸发对流自组装/低温填充Key words
germanium inverse opal/photonic crystal/plasma enhance chemical vapor deposition/solvent vaporization convectionself-assembly/filling at the lower temperature分类
信息技术与安全科学引用本文复制引用
李宇杰,谢凯,张良静,许静,韩喻,李运鹏..等离子体增强化学气相沉积技术制备锗反蛋白石三维光子晶体[J].硅酸盐学报,2008,36(9):1315-1318,4.基金项目
国家部委基金资助项目. （）
