发光学报2001，Vol.22Issue(z1)：13-16,4.
MOVPE生长氮化物四元系的热力学考虑
Thermodynamic Consideration of Nitride Quaternary Grown by MOVPE
摘要
Abstract
A quasi-thermodynamic model of GaxAly In1-x-y N alloys grown by MOVPE has been proposed. It is assumed that the alloy synthesized by the reactions between ammonia and group Ⅲ elements. The relationship between GaAlInN alloy and input molar ratio of group Ⅲ metalorganic compounds have been calculated. We especially concern the influence of growth condition on Ga rich GaxAlyIn1-x- yN which lattice matched to GaN.关键词
GaAlInN/MOVPE/膺热力学分析分类
信息技术与安全科学引用本文复制引用
陆大成,段树坤..MOVPE生长氮化物四元系的热力学考虑[J].发光学报,2001,22(z1):13-16,4.基金项目
国家自然科学重点基金资助项目 （）
