化工进展2009，Vol.28Issue(8)：1328-1332,5.
金属有机化学气相沉淀反应器结构的模拟优化
Simulation and optimization design in MOCVD reactor
摘要
Abstract
Reactor geometry has important effects on recirculation cells in reactor chamber. Recirculation cells above substrate affect not only thickness of film but also deposition rate uniformity. By modifying the reactor geometry into streamlined shape, the recirculation cells can be reduced even eliminated so that smooth and rectilinear flow prevails in the susceptor region. Among geometric parameters which affect natural convection, the reactor height plays the major role while the reactor diameter plays minor role. For optimized-shape reactor, the critical height for the onset of natural convection is about 2.5cm for D=20cm and 2cm for D=40cm at reference condition.关键词
金属有机化学气相沉淀/输运过程/薄膜生长/优化设计Key words
MOCVD/transport phenomena/thin film growth/optimization design分类
信息技术与安全科学引用本文复制引用
张红..金属有机化学气相沉淀反应器结构的模拟优化[J].化工进展,2009,28(8):1328-1332,5.基金项目
国家自然科学基金资助项目(60376006). （60376006）
