红外与毫米波学报2001,Vol.20Issue(2):136-138,3.
基于VO2薄膜非致冷红外探测器性能研究
CHARACTERIZATION OF UNCOOLED VO2-BASED THIN FILMS BOLOMETER
摘要
Abstract
An uncooled bolometer based on VO2 thin films deposited by reactive ion-beam sputtering was fabricated. The noise and responsivity for the spectral range 8-12μm were measured at 296K. At the chopper frequency of 30Hz, the device having a detectivity D* of 1.89×108cmHz1/2W-1and a thermal time constant of 0.011s was realized.关键词
测辐射热探测器/红外/二氧化钒/探测率/响应率分类
信息技术与安全科学引用本文复制引用
陈长虹,易新建,张静,熊笔峰..基于VO2薄膜非致冷红外探测器性能研究[J].红外与毫米波学报,2001,20(2):136-138,3.基金项目
国家高技术863基金资助项目 ()