光学精密工程2009，Vol.17Issue(6)：1367-1372,6.
用于多频振动的MEMS复合式能量采集器的设计
Design of MEMS hybrid energy generator for multi-frequency vibration
摘要
Abstract
The design, modeling and simulation of a novel MEMS hybrid energy generator for multi-frequency vibration is presented to meet the requirements of portable and wireless electronic devices for collecting energy from the ambient environment. In this design, piezoelectric cantilever beams and capacitors are combined for harvesting the hybrid vibration energy. Then,an analytical model is established for the multi-frequency vibration energy harvesting system and a numerical simulation method is used to predict the power output by using a MatLab/SIMULINK. The result shows that the structure can work efficiently in the frequency ranges of 630-655 Hz, and the power output can reach about 13.46 μW with a load resistance of 50 kΩ. Based on the result, an optimized multi-frequency hybrid energy harvester is designed in this paper. In addition, the Finite Element Analysis (FEA) of the structure is carried out to prevent the structure failure. The work implemented by this paper shows that the next generation design with a wider frequency range and a higher power output within a smaller structure volume is expectant.关键词
振动能量采集/复合式采集器/多频能量采集/微机电系统Key words
vibration energy harvesting/hybrid generator/multi-frequency energy harvesting/MEMS分类
信息技术与安全科学引用本文复制引用
任婧,陈旭远..用于多频振动的MEMS复合式能量采集器的设计[J].光学精密工程,2009,17(6):1367-1372,6.基金项目
Supported by the National Natural Science Foundation of China (Grant No.50575191) （Grant No.50575191）
the Science and Technology Program of Xiamen (Grant No.3502Z20063006) （Grant No.3502Z20063006）
