半导体学报2004，Vol.25Issue(11)：1386-1390,5.
一个DC-32GHz两位微机械移相器
A DC-to-32GHz 2Bit MEMS Phase Shifter
娄建忠 1赵正平 2杨瑞霞 2吕苗 3胡小东2
作者信息
- 1. 河北大学电子信息工程学院,保定,071002
- 2. 河北工业大学信息学院,天津,300130
- 3. 河北半导体研究所微米纳米中心,石家庄,050051
- 折叠
摘要
Abstract
A two-bit phase shifter with distributed microelectromechanical system (MEMS) transmission line (DMTL) is developed,and a novel structure which be actuated by coplanar waveguide transmission line (CPW-actuation structure) is proposed,which can reduce the actuation voltage significantly.The measured result,with actuation voltage less than 20V,0°/20.1°/41.9°/68.2° phase shift and -1.2dB insert loss at 20GHz,is demonstrated,and insertion loss/return loss is better than -1.8dB/-11dB from DC to 32GHz.The experimental results highlight the potential of a low-loss and broadband digital MEMS phase shifter on a high-permittivity substrate.关键词
微电子机械系统/移相器/共面波导驱动结构Key words
MEMS/phase shifter/CPW-actuation structure分类
信息技术与安全科学引用本文复制引用
娄建忠,赵正平,杨瑞霞,吕苗,胡小东..一个DC-32GHz两位微机械移相器[J].半导体学报,2004,25(11):1386-1390,5.
