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载气流量对氧化锌纳米棒阵列的影响

蔡芳芳 魏鸿源 范海波 杨安丽 张攀峰 刘祥林

人工晶体学报2008,Vol.37Issue(6):1401-1405,5.
人工晶体学报2008,Vol.37Issue(6):1401-1405,5.

载气流量对氧化锌纳米棒阵列的影响

Effect of Carrier Gas Flux on ZnO Nanorod Arrays Grown by MOCVD

蔡芳芳 1魏鸿源 1范海波 1杨安丽 1张攀峰 1刘祥林1

作者信息

  • 1. 中国科学院半导体研究所半导体材料科学重点实验室,北京,100083
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摘要

Abstract

ZnO nanorod arrays with different morphologies were grown by metalorganic chemical vapor deposition(MOCVD).The diameters of nanorods range from 150 nm to 20 nm through changing the carrier gas flux during the growth process.Measurements such as scanning electron microscope(SEM),X-ray diffraction(XRD),Raman scattering and photoluminescence(PL)spectrum were employed to analyze the differences of these nanorods.It was found that when both carrier gas flux of Zn and O reactant are 1 SLM,we can obtain the best vertically aligned and uniform nanorods.Furthermore,the PL spectrum reveals a blueshift of UV emission peak,which may be assigned to the increase of surface effect.

关键词

氧化锌纳米棒/MOCVD/载气流量/形貌

Key words

ZnO nanorod/MOCVD/carrier gas flux/morphology

分类

信息技术与安全科学

引用本文复制引用

蔡芳芳,魏鸿源,范海波,杨安丽,张攀峰,刘祥林..载气流量对氧化锌纳米棒阵列的影响[J].人工晶体学报,2008,37(6):1401-1405,5.

基金项目

Project supported by the Special Funds for Major State Basic Research Project(973 program)of China(No.2006CB604907) (973 program)

人工晶体学报

OA北大核心CSCDCSTPCD

1000-985X

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