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不同质量块布局双端固支梁的等效弹簧系数的热效应

伍康 叶雄英 刘力涛 杜敏 周兆英

光学精密工程2009,Vol.17Issue(6):1409-1414,6.
光学精密工程2009,Vol.17Issue(6):1409-1414,6.

不同质量块布局双端固支梁的等效弹簧系数的热效应

Thermal effect onequivalent spring constants of double-clamped beams with different mass arrangements

伍康 1叶雄英 1刘力涛 1杜敏 1周兆英1

作者信息

  • 1. 清华大学,精密仪器与机械学系,精密测试技术与仪器国家重点实验室,北京,100084
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摘要

Abstract

Thermal effect on the equivalent spring constants of double-clamped beams (bridges) with two kinds of mass arrangements including central mass and side mass were studied by theoretical analysis and finite element simulation. An equation to describe the change of the equivalent spring constants of beams due to temperature variation was derived and the equivalent spring constants from simulation results of the fundamental vibration frequency and the displacement under a static loadwere obtained respectively by the finite element analysis. Results show that the temperature variation has an important effect on the equivalent spring constants.For the fundamental vibration frequency,there are a good agreement between the derived equation and the vibration simulation results for the both structures. For the displacement under a static load, the asymmetry in mass arrangement results in the bending of the beam when temperature shifts,and the bending causes a displacement of the mass to the side. As a result, the asymmetric arrangement of mass changes the initial displacement of mass when temperature varies, which would cause the changes of output signals for Micro Electro Mechanic System (MEMS) sensors or actuators.

关键词

热效应/等效弹簧系数/双端固支梁/质量块布置

Key words

thermal effect/equivalent spring constant/double-clamped beam/mass arrangement

分类

信息技术与安全科学

引用本文复制引用

伍康,叶雄英,刘力涛,杜敏,周兆英..不同质量块布局双端固支梁的等效弹簧系数的热效应[J].光学精密工程,2009,17(6):1409-1414,6.

基金项目

Supported by the National Natural Science Foundation of China (Grant No.50730009) (Grant No.50730009)

光学精密工程

OA北大核心CSCDCSTPCD

1004-924X

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