光学精密工程2009，Vol.17Issue(6)：1442-1447,6.
高g值压阻式微加速度计设计
Design of highg piezoresistive micro-accelerometer
摘要
Abstract
The change in resistivity caused by the mechanical deformation in a micro-accelerometer was used to design an accelerator to measure physical quantities such as highg acceleration. The process and a solid model were constructed in CoventorWare. With changing the position of a piezoresistive sensing element on the fix-end cantilever,the optimizing location of the sensing element as well as the relationship between the output current and the location are obtained by using Finite Element Mothod(FEM) in the MemPZR module. Changing the sensitivity by the same percentage, it is proved that electric conductivity changes are coincident with the sensitivity changes of the element. When 20 kg acceleration is inputted, the potential distribution of piezoresistor device terminals,the corresponding stresses of the piezoresistive element and the current location are also obtained,which testifies the anti-over loading ability from the stress location in the fix-end cantilever.关键词
微机电系统/压阻加速度计Key words
MEMS/piezoresistive accelerometer分类
机械制造引用本文复制引用
刘凤丽,郝永平..高g值压阻式微加速度计设计[J].光学精密工程,2009,17(6):1442-1447,6.基金项目
Supported by the Natural Science Foundation of Liaoning Province(Grant No.ID20082047) （Grant No.ID20082047）
