光学精密工程2001，Vol.9Issue(1)：1-5,5.
全柔性机构与MEMS
Fully compliant mechanisms and MEMS
摘要
Abstract
Compliant mechanisms are devices that deliver a desired motion by undergoing elastic deformation. A typical compliant mechanisms is called fully compliant mechanism. Owing to their serveral significant advantages relative to c onventional mechanisms such as no backlash and friction, and no assembly, complia nt mechanisms especially fully compliant mechanisms have been applied to many fields especially in MEMS. So research on compliant mechanisms and fully compliant mechanisms has been a hot issue in recent years. This paper firstly describes their concepts, characteristics and applications in MEMS. Finally several critical techniques and tendencies such as the analysis, design and fabrication of fully compliant mechanisms, selection and design of flexure hinge, selection, desgin and control of the actuator etc. are discussed.关键词
柔性机构/全柔性机构/柔性铰链/微型机电系统分类
社会科学引用本文复制引用
于靖军,宗光华,毕树生..全柔性机构与MEMS[J].光学精密工程,2001,9(1):1-5,5.
