电子器件2007，Vol.30Issue(5)：1547-1551,5.
一种新型低压电容式RF MEMS开关的设计与分析
Design and Analysis of a Novel Low Actuation Voltage Capacitive RF MEMS Switches
宋明歆 1殷景华 1贺训军 1朱敏 1曹一江1
作者信息
- 1. 哈尔滨理工大学应用科学学院,哈尔滨,150080
- 折叠
摘要
Abstract
A novel design of capacitive RF MEMS switches using torsion spring is presented. The RF MEMS switches not only have ordinary folded-suspending beams, but also torsion springs,and the novel model is simulated with IntelliSuite software and so on. The Results from theoretical analysis and simulation show that compared with ordinary bending deflection, the torsion deflection is more sensibly influenced by the arm width than the arm thickness; the actuation voltage of the novel switches will be obviously depressed. At same time, theoretical analysis shows that the lower VT can be obtained with longer torsion arm length (LT), longer driven arm length (LD). By optimizing the structure design of RF MEMS switches, when LT, LD, b and t are 180 μm, 120 μm, 5 μm and 1 μm, respectively, the area actuation electrodes is 120 μm×120 μm, the actuation voltage is 1.5 V by computer simulating.关键词
RF MEMS开关/驱动电压/扭转/仿真Key words
RF MEMS switch/Low actuation voltage/Torsion spring/Simulation分类
信息技术与安全科学引用本文复制引用
宋明歆,殷景华,贺训军,朱敏,曹一江..一种新型低压电容式RF MEMS开关的设计与分析[J].电子器件,2007,30(5):1547-1551,5.
