半导体学报2004，Vol.25Issue(12)：1573-1575,3.
SOI热光4×4光开关阵列的研制
Design and Fabrication of Thermo-Optic 4×4 Switching Matrix in Silicon-on-Insulator
摘要
Abstract
A rearrangeable nonblocking thermo-optic 4×4 switching matrix,which consists of five 2×2 multimode interference-based Mach-Zehnder interferometer(MMI-MZI) switch elements，is designed and fabricated.The minimum and maximum excess loss for the matrix are 6.6 and 10.4dB,respectively.The crosstalk in the matrix is measured to be between －12 and －19.8dB.The switching speed of the matrix is less than 30μs.The power consumption for the single switch element is about 330mW.关键词
集成光学/马赫-曾德干涉仪/开关阵列/光开关Key words
integrated optics/silicon-on-insulator/matrix switches/PLC technology分类
信息技术与安全科学引用本文复制引用
王章涛,樊中朝,夏金松,陈少武,余金中..SOI热光4×4光开关阵列的研制[J].半导体学报,2004,25(12):1573-1575,3.基金项目
国家基础研究重点发展计划(批准号:G20000366),国家高技术研究发展计划(批准号:2002AA312060)和国家自然科学基金(批准号:60336010)资助项目 （批准号:G20000366）
