半导体学报2009，Vol.30Issue(4)：16-19,4.DOI:10.1088/1674-4926/30/4/043004 PACC:81 15;6855;7360
Thickness dependence of the properties of transparent conducting ZnO:Zr films deposited on flexible substrates by RF magnetron sputtering
Thickness dependence of the properties of transparent conducting ZnO:Zr films deposited on flexible substrates by RF magnetron sputtering
Zhang Huafu 1Lei Chengxin 1Liu Hanfa 1Yuan Changkun1
作者信息
- 1. School of Physics and Optic-Electronic Information,Shandong University of Technology,Zibo 255049,China
- 折叠
摘要
Abstract
Transparent conducting zirconium-doped zinc oxide(ZnO:Zr)thin films with high transparency,low resistivity and good adhesion were successfully prepared on water-cooled flexible substrates(polyethylene glycol terephthalate,PET)by RF magnetron sputtering.The structural,electrical and optical prooerties of the films were studied for different thicknesses in detail.X-ray diffraction(XRD)and scanning electron microscopy(SEM)revealed that all the deposited films are polycrystalline with a hexagonal structure and a preferred orientation perpendicular to the substrate．The lowest resistivity achieved is 1.55×10-3 Ω·cm for a thickness of 189 nm with a Hall mobility of 17.6cm2/(V·s)and a carrier concentration of 2.15×1020cm-3.All the films present a high transmittance of above 90％in the wavelength range of the visible spectrum.关键词
zirconium-doped zinc oxide thin films/flexible substrates/magnetron sputtering/transparent conduct ing filmsKey words
zirconium-doped zinc oxide thin films/flexible substrates/magnetron sputtering/transparent conduct ing films分类
信息技术与安全科学引用本文复制引用
Zhang Huafu,Lei Chengxin,Liu Hanfa,Yuan Changkun..Thickness dependence of the properties of transparent conducting ZnO:Zr films deposited on flexible substrates by RF magnetron sputtering[J].半导体学报,2009,30(4):16-19,4.
