东南大学学报（英文版）2005，Vol.21Issue(1)：16-19,4.
基于修正莫尔信号的超精密定位技术
Ultra-precision alignment technique based on modified Moiré signals
摘要
Abstract
A novel method for automatic ultra-precision alignment is presented.This method relies on the modified Moiré technique,and alignment marks are used in the form of gratings.The modified Moiré technique can effectively improve detecting sensitivity of signals and simplify the control system by using only one pair of laser-Moiré sensors.We present the mathematical model and simulation results of diffracting two gratings.The effect of various parameters on Moiré signals is studied theoretically and experimentally,and the results are found to be consistent.A computer controlled alignment device using one pair of Moiré sensors is designed.The device can achieve a fully automatic precision alignment by the modified Moiré signal.The experimental result shows that the alignment device can obtain the resolution of 5 nm and the positioning accuracy of ±0.5 μm.关键词
莫尔信号/超精密定位/修正莫尔技术/自动控制Key words
Moiré signal/ultra-precision alignment/modified Moiré technique/automatic control分类
信息技术与安全科学引用本文复制引用
张金龙,陈从颜,余玲玲,刘京南..基于修正莫尔信号的超精密定位技术[J].东南大学学报（英文版）,2005,21(1):16-19,4.基金项目
The Natural Science Foundation of Higher Education Institutions of Jiangsu Province (No.04KJB510073). （No.04KJB510073）
