光学精密工程2009，Vol.17Issue(7)：1635-1639,5.
电液动力微泵微电极的不同制作工艺的比较
Comparison of different processes in making EHD micropump electrode
摘要
Abstract
The fabrication and design of micro-electrodes(the key component of Electrohydrodynamic(EHD) micropump) using MEMS technology are studied in this paper. The main part of the EHD micropump is a planar electrode array composed of electrode pairs made of the emitter and the collector. The electrohydrodynamic (EHD) pump uses the interaction between an electric field and electric charges, dipoles or particles embedded in a dielectric fluid to drive the fluid. The major key-controlling variables including the selection of electrode materials, diversification of electrode geometrical design, comparison of different fabrication processes, electroplating and kit-off process are analyzed systematically.The experimental results show that noble metals have good performance of resistance for corrosion electrochemical processes, and the electrode with sharp geometry can improve the performance of micropump. It also shows that kit-off process is better than electroplating process in electrode quality.关键词
电液动力效应/微机电系统/微泵/微电极Key words
electrohydrodynamic (EHD)/MEMS/micropump/micro electrode分类
机械制造引用本文复制引用
于翮,张强,乔大勇,俞坚..电液动力微泵微电极的不同制作工艺的比较[J].光学精密工程,2009,17(7):1635-1639,5.基金项目
Supported by the National Natural Science Foundation of China (Grant No.50676001) （Grant No.50676001）
