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Automatic abstraction of interference fringes with image technique

哈尔滨工业大学学报（英文版）2002，Vol.9Issue(2)：166-169,4.

Automatic abstraction of interference fringes with image technique

作者信息

1. Dept.of Automation Measurement & Control Engineering,Harbin Institute of Technology,Harbin 150001,China;Dept.of Automation Measurement & Control Engineering,Harbin Institute of Technology,Harbin 150001,China;Dept.of Automation Measurement & Control Engineering,Harbin Institute of Technology,Harbin 150001,China
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摘要

Abstract

An automatic abstraction technique of interference fringes used in phase-modulation and phase-scanning-modulation interferometer is presented.For the measurement of amplitudes of interference fringes,fringes are fitted and their central points are determined automatically according to their distribution rules.However,for the measurement of their phases,fringes should be recognized and processed with different calculating algorithms and least-square optimization methods depending on the scanning modulation mode.When this technique is used for measurement of surface roughness,the measurement uncertainty is better than 5nm and the repeatability is less than 5%.

关键词

interference fringes abstraction/phase-modulation/image detection

Key words

interference fringes abstraction/phase-modulation/image detection

分类

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引用本文复制引用

..Automatic abstraction of interference fringes with image technique[J].哈尔滨工业大学学报（英文版）,2002,9(2):166-169,4.

基金项目

Sponsored by the National Doctors Finance of China(Grant No.97021328). （Grant No.97021328）

哈尔滨工业大学学报（英文版）

ISSN：1005-9113

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