半导体学报2008，Vol.29Issue(9)：1703-1707,5.
大位移低电压的静电MEMS驱动器
An Electrostatic MEMS Actuator with Large Displacement Under Low Driving Voltage
摘要
Abstract
A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed. Side stability is analyzed to improve the performance of the actuator. According to the analysis, a comb-drive actuator with small comb gap, high-stiffness-ratio prebent suspension beams, non-initial overlap, and linear-engaged-length comb teeth is proposed and the parameters of the actuator are derived. Experiments indicate that the actuator resonates at 573Hz with a Q factor of 35. 88 and reaches a maximum displacement of over 100μm at a driving voltage of 71V, which fulfills the design requirements and matches the analytical value to within 2.1%.关键词
梳齿驱动器/侧向稳定性/MEMSKey words
comb-drive actuator/side stability/MEMS分类
信息技术与安全科学引用本文复制引用
明安杰,李铁,周萍,王跃林..大位移低电压的静电MEMS驱动器[J].半导体学报,2008,29(9):1703-1707,5.基金项目
国家重点基础研究发展计划资助项目(批准号:2006CB30040) Project supported by the State Key Development Program for Basic Research of China (No.2006CB30040) （批准号:2006CB30040）
