半导体学报2008，Vol.29Issue(9)：1715-1722,8.
微加速计固有频率的推导及验证
Calculation ,Simulation, and Testing for the Natural Frequency of a Micro Accelerometer
摘要
Abstract
A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural design process, is deduced and confirmed by experiment. A simplified analytical model is established to describe the accelerometer's mechanical behavior and deduce the formula for the natural frequency. Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelerometer and verify the formula. The results obtained from the analytical model and the finite element simulation show good agreement. Finally, a shock comparison method designed for acquiring the high frequency characteristics of the accelerometer is introduced to verify the formula by testing its actual natural frequency.关键词
固有频率/微加速度计/Rayleigh-Ritz公式Key words
Natural frequency/micro accelerometer/Rayleigh-Ritz formula分类
信息技术与安全科学引用本文复制引用
熊继军,范波,郭虎岗,高建飞..微加速计固有频率的推导及验证[J].半导体学报,2008,29(9):1715-1722,8.基金项目
国家自然科学基金(批准号:50775209)及NCET资助项目 Project supported by the National Natural Science Foundation of China (No. 50775209) and NCET （批准号:50775209）
