传感技术学报2006，Vol.19Issue(5)：1750-1753,4.
基于复合静电驱动结构的硅微机械扭转微镜
Novel MEMS Torsion Micromirror with Compound Driving Structures
栗大超 1吴文刚 2袁勇 1陈庆华 1郝一龙 1胡小唐1
作者信息
- 1. 北京大学微电子学研究院,北京,100871
- 2. 天津大学精密测试技术及仪器国家重点实验室,天津,300072
- 折叠
摘要
Abstract
Some new kinds of torsion micromirrors with advanced compound driving structures as well as novel folding torsion-spring structures are proposed and fabricated in SOI wafers by combing with bulk micro machining and surface micro machining technology to improve the electromechanical performances and the optical properties of torsion micromirrors. To evaluate the mechanical robustness and the electrical response, the electromechanical performances of the components are investigated experimentally and theoretically. At the same time the surface roughness of the micromirrors is measured and analyzed to characterize the optical properties of the micromirrors. And then some parameters which greatly affect the mirror's total performance are obtained.The theoretical and experimental studies manifest that the compound driving structures and folding torsion-spring structures are much benefit to decreasing the yielding voltages of actuating the micromirrors and, thus, making their tilting motion easier.关键词
MEMS/扭转微镜/硅微加工/SOI/复合驱动/表面粗糙度Key words
MEMS/torsion micromirror/silicon micromachining/SOI/compound driving structures/surface roughness分类
信息技术与安全科学引用本文复制引用
栗大超,吴文刚,袁勇,陈庆华,郝一龙,胡小唐..基于复合静电驱动结构的硅微机械扭转微镜[J].传感技术学报,2006,19(5):1750-1753,4.
