中山大学学报(自然科学版)2007，Vol.46Issue(z1)：179-180,2.
硒化法制备铜铟铝硒薄膜及其性能研究
Investigation of CuIn1-xAlxSe2 Thin Film for Solar Cells Prepared by a Selenization Process
摘要
Abstract
CuInAl (CIA) films as precursors for CIAS were prepared using middle frequency A.C. magnetron sputtering and CIAS absorbers were obtained by selenization. SEM and XRD were used to observe and analyze the compositions, microstructures, and surface morphologies of the films. The results show that the CIAS absorber films with a Cu/(In+Al) atomic ratio of approaching 1 and an adjustable Al/(In+Al) ratio could be obtained by adjusting Al concentration in CIA precursors. CIAS obtained in the work is composed of Cu(In1-xAlx)Se2 phase. Al exists mainly in solid solution by substituting In.关键词
太阳能电池/CIAS/磁控溅射/前驱膜/硒化Key words
solar cell/CIAS/magnetron sputtering/precursor film/selenization分类
信息技术与安全科学引用本文复制引用
向华,庄大明,张弓,李春雷..硒化法制备铜铟铝硒薄膜及其性能研究[J].中山大学学报(自然科学版),2007,46(z1):179-180,2.基金项目
国家高技术研究发展计划(863计划)资助项目(2004AA513023) （863计划）
