强激光与粒子束2001，Vol.13Issue(2)：181-185,5.
实现Nd:YAG光束匀滑的衍射光学器件的研制
Design, fabrication and experiment of diffractive optical
element to realize Nd:YAG laser beam smoothing
谭峭峰 1袁静 2严瑛白 1金国藩 1徐端颐1
作者信息
摘要
Abstract
The hybrid algorithm, combing hill-climbing and simulated annealing, and hollowed-out mask are adopted to design and fabricate the diffractive optical element (DOE) with diameter 80mm, to realize beam smoothing for the fundamental wave and the third harmonic wave of Nd:YAG laser. The edge of the DOE is measured by the profilometer, which shows a rather large etching depth error exists. The performance of the DOE is experimentally studied with a pulse-operating Nd:YAG laser. Focused spots have been obtained with the corresponding design size and sharp edge, while a large top modulation exists too. The feasibility of the DOE used in the solid laser beam smoothing is preliminary proved by these firstly obtained experimental results.关键词
光束匀滑/衍射光学器件/镂空掩模板/混合优化算法分类
信息技术与安全科学引用本文复制引用
谭峭峰,袁静,严瑛白,金国藩,徐端颐..实现Nd:YAG光束匀滑的衍射光学器件的研制[J].强激光与粒子束,2001,13(2):181-185,5.
