半导体学报2009，Vol.30Issue(5)：18-21,4.DOI:10.1088/1674-4926/30/5/053001
Properties of CdTe nanocrystalline thin films grown on different substrates by low temperature sputtering
Properties of CdTe nanocrystalline thin films grown on different substrates by low temperature sputtering
Chen Huimin 1Guo Fuqiang 1Zhang Baohua2
作者信息
- 1. Department of Physics, Changji College, Changji 831100, China
- 2. College of Physical Science and Technology, Xinjiang University, Urumqi 830046, China
- 折叠
摘要
Abstract
CdTe nanocrystalline thin films have been prepared on glass, Si and Al2O3 substrates by radio-frequency magnetron sputtering at liquid nitrogen temperature. The crystal structure and morphology of the films were characterized by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FESEM). The XRD examinations revealed that CdTe films on glass and Si had a better crystal quality and higher preferential orientation along the (111) plane than the Al2O3. FESEM observations revealed a continuous and dense morphology of CdTe films on glass and Si substrates. Optical properties of nanocrystalline CdTe films deposited on glass substrates for different deposited times were studied.关键词
CdTe/thin films/RF magnetron sputtering/crystal structure/X-ray diffraction/optical propertiesKey words
CdTe/thin films/RF magnetron sputtering/crystal structure/X-ray diffraction/optical properties分类
电子信息工程引用本文复制引用
Chen Huimin,Guo Fuqiang,Zhang Baohua..Properties of CdTe nanocrystalline thin films grown on different substrates by low temperature sputtering[J].半导体学报,2009,30(5):18-21,4.
