半导体学报2007，Vol.28Issue(2)：189-195,7.
考虑光学邻近效应的详细布线算法
Detailed Routing Algorithm with Optical Proximity Effects Constraint
摘要
Abstract
We present a detailed routing algorithm considering the optical proximity effect. The light intensity is calculated beforehand and stored in look-up tables. These costs are used as a constraint to guide the sequential routing. The routing algorithm is based on constructed force directed Steiner tree routing to enhance routing efficiency. Experimental results on industrial benchmark circuits show that the presented routing algorithm can obtain much improvement considering optical effects short runtime.关键词
光学邻近效应校正/详细布线/Steiner树/成品率Key words
optical proximity effect/detailed routing/Steiner tree/yield分类
信息技术与安全科学引用本文复制引用
周强,蔡懿慈,张为,洪先龙..考虑光学邻近效应的详细布线算法[J].半导体学报,2007,28(2):189-195,7.基金项目
国家自然科学基金资助项目(批准号:60476014) Project supported by the National Natural Science Foundation of China (No.60476014) （批准号:60476014）
