北京大学学报（自然科学版）2001，Vol.37Issue(2)：200-204,5.
Al2O3或TiO2掺杂的ScSZ固体电解质纳米晶薄膜的制备及表征
Preparation and Characterization of Nanocrystalline Thin Films of Al2O3 or TiO2 Doped Scandia Stabilized Zirconia Solid Electrolytes
摘要
Abstract
Dense,crack-free and uniform nanocrystalline (Al2O3）0.10(Sc2O3)0.08(ZrO2)0.82and (Sc2O3)0.125(TiO2)0.175(ZrO2)0.70 thin films with thickness of 0.31 μm and 0.36 μm respectively on Si(100) substrate,have been successfully prepared by a Sol\|Gel spin coating method.Cubic nanocrystals can be obtained at relatively low sintering temperature with an average grain size of about 47 nm and 51 nm respectively.The aluminia-doped ScSZ thins film are the same dense as the ScSZ thin films.However,there are a small amount of pinholes found in the microstructure of the titania-doped ScSZ films.关键词
铝或钛掺杂的氧化钪稳定的氧化锆/纳米晶薄膜/Sol-Gel制备/表征分类
数理科学引用本文复制引用
张亚文,杨宇,金舒,田曙坚,李国宝,贾江涛,廖春生,严纯华..Al2O3或TiO2掺杂的ScSZ固体电解质纳米晶薄膜的制备及表征[J].北京大学学报（自然科学版）,2001,37(2):200-204,5.基金项目
国家自然科学基金(29525101,29701001,29832010)、国家重点基础研究发展规划(G1998061300)、国家教育部博士点基金和北大方正基金资助项目 （29525101,29701001,29832010）
