传感技术学报2007，Vol.20Issue(9)：2139-2142,4.
一种微悬臂梁疲劳特性的检测方法
A Method to Measure the Fatigue Property of a Micro-Cantilever Beam
摘要
Abstract
Many results on the fatigue properties of a MEMS structure have been reported, among which the typical approaches were based on and developed from the principles of detecting the flaws and their propagations, such as using a fan shape comb-drivers to yield cyclic compression and tension, and then, to observe the flaw propagation in a Si beam structure. This paper aims at describing the fatigue phenomenon by using the gradually variable parameters i.e., mean E method, and then, proposing a test structure, through measuring capacitance to describe the fatigue property. This capacitance has a close relation to the displacement induced by the force applied on. The mean Young's modulus E is calculated according to the measured capacitance to reflect the fatigue property of the simple MEMS structure. At the end of this article, this method is verified by ANSYS.关键词
MEMS/可靠性/疲劳/悬臂梁Key words
MEMS/reliability/fatigue/cantilever分类
信息技术与安全科学引用本文复制引用
余存江,唐洁影,黄庆安..一种微悬臂梁疲劳特性的检测方法[J].传感技术学报,2007,20(9):2139-2142,4.基金项目
电子元器件可靠性物理及其应用技术国家级重点实验室项目资助(51433030105JW0601) （51433030105JW0601）
