半导体学报2008，Vol.29Issue(2)：219-223,5.
一种新型的基于滑膜阻尼的电容式双向MEMS惯性传感器
A Novel Capacitive Biaxial Microaccelerometer Based on the Slide-Film Damping Effect
摘要
Abstract
A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam,joint beam, and damping adjusting combs. The sensing method of changing capacitance area is used in the design, which depresses the requirement of the DRIE process, and de-creases electronic noise by increasing sensing voltage to improve the resolution. The parameters and characteristics of the biaxial microaccelerometer are discussed with the FEM tool ANSYS. The simulated results show that the transverse sensi-tivity of the sensor is equal to zero. The testing devices based on the slide-film damping effect are fabricated, and the tes-ting quality factor is 514, which shows that the designed structure can improve the resolution and proves the feasibility of the designed process.关键词
电容式传感器/惯性传感器/高分辨率/MEMSKey words
capacitive accelerometer/inertial sensor/high resolution/MEMS分类
信息技术与安全科学引用本文复制引用
董林玺,颜海霞,钱忺,孙玲玲..一种新型的基于滑膜阻尼的电容式双向MEMS惯性传感器[J].半导体学报,2008,29(2):219-223,5.基金项目
Project supported by the National Natural Science Foundation of China (No. 60506015) （No. 60506015）
