华中科技大学学报（自然科学版）2001，Vol.29Issue(2)：22-24,3.
SmCo(Al,Si)/Cr硬磁薄膜的结构与性能
Microstructure and Properties of SmCo(Al,Si)/Cr Permanent in Magnetic Thin Films
摘要
Abstract
Sm(Co,Al,Si)/Cr films have been prepared as one kind of promising materials for the longitudinal recording media and permanent magnetic thin film under the optimal conditions of magnetron sputtering and annealing. The result reveals that when Sm content, Cr underlayer thickness and the thickness of Sm(Co,Al,Si)5 magnetic thin film are 31.6 % atm, 66 nm and 33 nm respectively, the Sm(Co,Al,Si)5/Cr thin films have been fabricated with coercivity up to 187.8 kA/m, quareness ratio S=Mr/Ms near 0.94, after being annealed at 500 ℃ for 25 minutes, the films with coercivity Hc up to 1 042.5 kA/m and squareness ratio S about 0.92 are obtained.关键词
硬磁薄膜/矫顽力/磁控溅射分类
通用工业技术引用本文复制引用
王翔,李佐宜,林更琪,蔡长波..SmCo(Al,Si)/Cr硬磁薄膜的结构与性能[J].华中科技大学学报（自然科学版）,2001,29(2):22-24,3.基金项目
国防预研基金重点资助项目；教育部高等学校博士点专项科研基金资助项目；教育部薄膜与微细技术开放实验室基金资助项目. （）
