半导体学报（英文版）2008，Vol.29Issue(12)：2311-2315,5.
RF磁控溅射制备AZO透明导电薄膜及其性能
Structural ,Electrical ,and Optical Properties of Transparent Conductive Al-Doped ZnO Films Prepared by RF Magnetron Sputtering
杨伟锋 1刘著光 1张峰 1黄火林 1吴正云1
作者信息
摘要
Abstract
Highly conductive transparent Al-doped zinc oxide (AZO) films with highly (002)-preferred orientation were successfully deposited on glass substrates at room temperature by RF magnetron sputtering. Optimization of deposition parameters was based on sputtering RF power and Ar pressure in the vacuum chamber. AZO films of 180nm with an electrical resistivity as low as 2.68 × 103Ω. cm and an average optical transmission of 90% in the visible range were obtained at RF power of 250W and Ar pressure of 1.2Pa. The effect of chemisorption of oxygen on the grain boundary would capture electrons from conduction band and lead the formation of potential barriers among the crystallites, which will influence the electric property of the AZO thin films. The films have satisfactory properties of low resistance and high transmittance for application as transparent conductive electrodes in light emitting diodes (LEDs) and solar cells.关键词
RF磁控溅射/透明导电薄膜/AZO薄膜Key words
RF magnetron sputtering/transparent conductive film/AZO film分类
数理科学引用本文复制引用
杨伟锋,刘著光,张峰,黄火林,吴正云..RF磁控溅射制备AZO透明导电薄膜及其性能[J].半导体学报（英文版）,2008,29(12):2311-2315,5.
