哈尔滨工业大学学报（英文版）2009，Vol.16Issue(2)：232-236,5.
Oriented Growth of PZT thick film embedded with PZT nanoparticles
Oriented Growth of PZT thick film embedded with PZT nanoparticles
摘要
Abstract
This paper reports that dense and crack-free (100) oriented lead zirconate titanate (Pb(Zr0.52Ti0.48)O3,PZT) thick film embedded with PZT nanoparticles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly (100) oriented. The (100) orientation degree of the PZT films strongly depended on annealing time and for the 4 μm-thick PZT film which was annealed at 700 ℃ for 5 min is the largest. The (100) orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3 μm-thick PZT thick film which was annealed at 700 ℃ for 5 min has the strongest (100) orientation degree, which is 82. 3%.关键词
PZT/sol-gel/thick film/oriented growthKey words
PZT/sol-gel/thick film/oriented growth分类
信息技术与安全科学引用本文复制引用
DUAN Zhong-xia,YUAN Jie,ZHAO Quan-liang,LU Ran,CAO Mao-sheng..Oriented Growth of PZT thick film embedded with PZT nanoparticles[J].哈尔滨工业大学学报（英文版）,2009,16(2):232-236,5.基金项目
Sponsored by 863 Scientific Project of China (Grant No. 2007AA03Z103) ,the National Natural Science Foundation of China (Grant No. 50742007) and the Key Laboratory Foundation of Sonar Technology of China(Grant No. 9140C24KFO901). （Grant No. 2007AA03Z103）
