电子器件2008，Vol.31Issue(1)：233-235,238,4.
晶向对SnO2:F透明导电玻璃特性的影响
The Effect of Orientation Oil the Properties of Transparent Conducting SnO2：Films
摘要
Abstract
Highly transparent and low-resistance SnO2：F films have been deposited by an ultrasonic spray pyrolysis process.SnCl4·5H2O and NH4 F were used as tin source compound and for F doping，respectively.The temperature of substrates was about 360℃.An X-ray diffraction(XRD)unit was used for recording the XRD patterns.Surface morphology，optical transmittance and sheet resistance were examined and characterized.The XRD results show that the primary crystal structures of thin films are polycrystalline SnO2 tetragonal phase.The SnO2：F films，which deposited under different conditions，have different preferred orientation among(110)，(200).The films with strong(200)orientations have the lowest sheet resistance at 5 Ω/□.All films are highly transparent and uniform. The average transmittance can reach 80 ～90％at the wavelength range of 450～1000 nm关键词
SnO2/F/超声喷雾法/择优取向/透光率/面电阻Key words
SnO2/F/Ultrasonic Spray Pyrolysis Process/Preferred Orientation/Optical transmission/sheet resistance分类
信息技术与安全科学引用本文复制引用
羊亿,罗友良,刘敏,何胜,黄芳,黄素梅..晶向对SnO2:F透明导电玻璃特性的影响[J].电子器件,2008,31(1):233-235,238,4.基金项目
This work was supported the Sciemific Research Foundation for the Returned Overseas Chinese Scholars,State Education Ministry,and by Foundations of Pujiang Talented Person Plans(No.05PJl4037)and Nanotechnology(No.0552nm042)of Shanghai Municipal Science & Technology Committee,and ShanghaiApplied Materials Research and Development fund (No.0519). （No.05PJl4037）
