电子器件2008，Vol.31Issue(1)：236-238,3.
超声喷雾热解法制备 TiO2 薄膜
Ultrasonic Spray Pyrolysis Deposition of TiO2 Films
摘要
Abstract
TiO2 films were successfully deposited on glass substrates using ultrasonic spray pyrolysis meth- od. Ti (SO4)2 was used as reactant. Methanol was used as solvent. Tiny fog droplets including reactant produced by ultrasonic nebulizer unit were sprayed on pre-heated glass substrates. Then, pyrolysis of re-actant will happen and thin films will be deposited on the glass. Several deposition condition such as con-centration, temperature and deposition time were optimized for obtaining compact and uniform thin films.The crystal structure and surface morphology were characterized by XRD and AFM. The results show that the crystal structures of films are polycrystalline TiO2 anatase phase. The preferred orientation is (101).关键词
TiO2/Ti(SO4)2/超声喷雾法/锐钛矿Key words
TiO2/ Ti(SO2)2/ Ultrasonic Spray pyrolysis/ anatase.分类
信息技术与安全科学引用本文复制引用
何胜,羊亿,刘敏,罗友良,黄素梅..超声喷雾热解法制备 TiO2 薄膜[J].电子器件,2008,31(1):236-238,3.基金项目
This work was supported the Scientific Research Foundation for the Returned Overseas Chinese Scholars,State Education Ministry,and by Foundations of Pujiang Talented Person Plans(No.05PJ14037)and Nanotechnology(N0.0552nm042)of Shanghai Munidpal Science & Technology Committee,and Shanghai-Applied Materials Research and Development fund (No.0519). （No.05PJ14037）
