光学精密工程2008，Vol.16Issue(12)：2366-2370,5.
采用双晶片驱动的棒板结合式压电驱动器设计
Disk-pivot structure micro piezoelectric actuator with bimorph
摘要
Abstract
A disk-pivot structure micro piezoelectric actuator with bimorph is designed.Different from the piezoelectric actuators described in reference papers,two piezoelectric discs in the actuator are bonded on the both sides of the bronze stator.The metal cylinder on the stator is used to amplify the transverse displacement and to actuate the metal rod rotor to rotate.The stator is analysed using Finite Element Analysis(FEA),the results show that the actuator can provide more transverse and vertical displacements than the previous prototype with only one ceramic disc under the same driving and boundary conditions,the improvements can be nearly 25%.This new structure can also avoid the coupling phenomena between different vibration modes and generate identical modal shape to enhance the stability of the actuator.Experiments illustrate that under the driving voltage 25 Vo-p,the actuator with only one ceramic disc can not run and the actuator with bimorph structure still has a speed of 512r/min.Such piezoelectric actuator can be optimized and adj usted to satisfy different practical applications,such as precise positioning instrument,bioengineering and optical foCUS system,etc..关键词
压电驱动器/振动模态/棒板结合/有限元法Key words
piezoelectric actuator/vibration mode/disk-pivot/Finite Element Method(FEM)分类
信息技术与安全科学引用本文复制引用
褚祥诚,陈翔宇,李龙土..采用双晶片驱动的棒板结合式压电驱动器设计[J].光学精密工程,2008,16(12):2366-2370,5.基金项目
Supported by the NSAF(No.10676015) （No.10676015）
the NSFC(No.50621201) （No.50621201）
the National 863 High Teeh-nology Research and Development Program of China(No.2007AA032107) （No.2007AA032107）
