半导体学报2003，Vol.24Issue(3)：245-249,5.
16信道0.35μm CMOS/VCSEL光发射模块
16-Channel 0.35μm CMOS/VCSEL Transmission Modules
摘要
Abstract
The vertical cavity surface emitting laser (VCSEL) arrays and VCSEL-based optical transmission modules are investigated.It includes the VCSEL's spectral characteristic,modulation characteristic,high frequency characteristic,and compatibility with microelectronic circuit.The module consists of 1×16 VCSEL array and 16-channel lasers driver with 0.35μm CMOS circuit by hybrid integration.During the test process,the module operates well at more than 2GHz in -3dB frequency bandwidth.关键词
垂直腔面发射激光器/CMOS/光电子混合集成/光互连Key words
VCSEL/CMOS/optoelectronic integration/optical interconnects分类
信息技术与安全科学引用本文复制引用
陈弘达,申荣铉,毛陆虹,唐君,梁琨,杜云,黄永箴,吴荣汉,冯军,柯锡明,刘欢艳,王志功..16信道0.35μm CMOS/VCSEL光发射模块[J].半导体学报,2003,24(3):245-249,5.基金项目
国家高技术研究发展计划(编号:2001AA122032,2001AA312080,2002AA312240),国家自然科学基金(批准号:69896260)资助项目 （编号:2001AA122032,2001AA312080,2002AA312240）
