电子器件2008，Vol.31Issue(1)：249-251,255,4.
应用于 FED 的金刚石薄膜的光学和结构分析
Structural and Optical Analysis of the Diamond Films for FED Application
摘要
Abstract
Diamond films with different grain size and microstructure deposited by hot filament chemical va-por deposition (HFCVD) method were evaluated on their field emission properties for FED applications. Nano-size effect plays a very important role in the performance of field emission of the nano-diamond film. Compared the films in different size, it has been found that nano-diamond films have better field emission behavior than films with large size grains, such as grains in the level of micron. From Raman spectra, dia-mond film with certain non-diamond components has shown best electron emission behavior and low turn-on-field (E0). Additionally, Electron emission behavior of the films with more (111) diamond grains is quite better than that of films with more other grains.关键词
场发射/开启电场/发射电流/(111)定向金刚石薄膜/拉曼光谱Key words
field emission/ turn-on-field/ emission current/ (111) diamond film/ Raman spectra分类
信息技术与安全科学引用本文复制引用
胡广,王林军,祝雪丰,刘建敏,黄健,徐金勇,夏义本..应用于 FED 的金刚石薄膜的光学和结构分析[J].电子器件,2008,31(1):249-251,255,4.基金项目
国家自然科学基金项目资助(60577040) （60577040）
上海市应用材料研究和发展基金资助(0404) （0404）
上海纳米技术项目资助(0452nm051,0552nm046) （0452nm051,0552nm046）
上海市重庆学科资助(T0101) （T0101）
This work was supported by the National Natural Science Foundation of China(60577040),Shanghai Foundation of Applied Materials Research and Development(0404),Nano-technology project of Shanghai(0452nm051,0552nm046)and Shanghai Leading Academic Disciplines(T0101). （60577040）
