物理学报2001，Vol.50Issue(2)：251-255,5.
离子的轰击对Si衬底上金刚石核附着力的影响
INFLUENCE OF ION BOMBARDING ON ADHESION FORCE OF DIAMOND NUCLEI ON Si SUBSTRATE
摘要
Abstract
The enhanced nucleation process of diamond by negative substrate bias was investigated by scanning electron microscopy and atomic force microscopy. The mechanism of enhanced joint adhesion of diamond nuclei on Si substrate by ion bombardment was theoretically approached, and the relationship between negative substrate bias and adhesion of diamond nuclei on Si substrate was given.关键词
金刚石膜/离子轰击/核化/附着力分类
数理科学引用本文复制引用
王必本,王万录,廖克俊,肖金龙,方亮..离子的轰击对Si衬底上金刚石核附着力的影响[J].物理学报,2001,50(2):251-255,5.基金项目
国家自然科学基金(批准号：19904016)资助的课题. （批准号：19904016）
